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Company
CKD
Description
FSM3-L (SUS)
Bill of material
FSM3-L005U2AA1A1N-A
MODEL
Model no.
FSM3
D
Display
L : Liquid crystal display
RFR
Flow rate range (full scale flow rate)
FD
Flow direction
M
Body material/compatible fluids
PS
Port size
PD
Piping direction
1 : Straight
O
Output specifications
U
Unit specifications
VO
Valve option
C
Lead wire
MA
Mounting attachments
DT
Included documents
CS
Clean-room specifications
OPTION
Option (ATEX Compliant)